TE Connectivity 85UHP Pressure Sensors

Introduction

The TE Connectivity 85UHP Pressure Sensors are advanced sensing devices designed for ultra-high purity and vacuum applications. Utilizing a MEMS piezo-resistive chip, these sensors offer exceptional precision and stability, making them ideal for critical semiconductor processes.

Part Description

TE Connectivity's Measurement Specialties 85UHP Pressure Sensors feature a MEMS piezo-resistive chip housed in a compact stainless steel module. The sensors are designed to operate in ultra-high purity and vacuum environments, ensuring reliable pressure measurement. The wetted surfaces are optimized for compatibility with various media, and the sensors are available in both C276 alloy and 316L stainless steel options. With a temperature range of -40°C to +125°C and a high vacuum stability of 10^-3 Pa, these sensors deliver solid-state reliability and long-term stability with a non-linearity of up to ±0.1%.

Applications

• Gas cabinets
• Mass flow controllers
• High-purity gas delivery systems
• Pressure and flow control in semiconductor processes

Industries

• Semiconductor manufacturing
• Aerospace
• Pharmaceuticals
• Chemical processing
• Environmental monitoring

Usage Ideas

1. Semiconductor Process Control: Integrate the 85UHP Pressure Sensor into a semiconductor fabrication system to monitor and control gas pressures accurately during the manufacturing process.
2. High-Purity Gas Delivery System: Design a high-purity gas delivery system for laboratory applications that utilizes the sensor to ensure precise pressure measurements and maintain the integrity of sensitive materials.
3. Vacuum System Monitoring: Implement the 85UHP Pressure Sensor in a vacuum chamber to continuously monitor pressure levels, ensuring optimal conditions for experiments or manufacturing processes.

Conclusion

The TE Connectivity 85UHP Pressure Sensors are a reliable choice for applications requiring high precision and stability in ultra-high purity and vacuum environments. With their robust design and advanced MEMS technology, these sensors are well-suited for various industries, particularly in semiconductor manufacturing and high-purity gas applications.